GF125 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Long-term zero stability of <±0.5% full scale per year
Ultra-fast settling times: 300 ms - <700 ms
Full-scale flow rates up to 300 slpm
Ultra-high purity flow path - 4µ inch Ra surface finish
SEMI F20 compliant wetted materials
Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues
Optional High Accuracy configuration
DeviceNetTM, RS-485 L-Protocol and analog interfaces

Benefits

By combining Brooks' patented flow sensor technology with a fast acting diaphragm free valve assembly, the GF125 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers
Optimized wetted flow path for improved dry-down
With MultiFloTM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
A full gas database delivers the widest process gas coverage
Pressure Transient Insensitivity (PTI) capability overcomes limitations of conventional MFCs that react strongly to small inlet pressure fluctuations. The result is stable performance and predictable accuracy.
GF125 High Accuracy (HA) with superior low setpoint accuracy makes it possible to replace two (a high and low flow) mass flow controllers with one, providing immediate cost savings while freeing up a gas line for greater gas panel flexibility.
Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting

GF125	GF125HA	GF126
Differentiator	Ultra-High Purity Ultra-Fast Response Time Pressure Transient Insensitivity	High Accuracy	High Flow Rate
Flow Range (Full Scale Capacity)	3 sccm - 55 slm	5 sccm - 10 slm N2 Eq.	55 slm - 300 slm
Surface Finish	4µ inch Ra	4µ inch Ra	4µ inch Ra
Accuracy	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. 10-100% F.S. ±1% S.P. plus ±0.04% F.S. 1-10% F.S.	±1% S.P. > 35-100% ±0.35% F.S. 2-35%
Repeatability	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.
Response Time	Normally Closed Valve 300ms (3-860 sccm N2 Eq.) 400ms (861-7200 sccm N2 Eq.) 500ms (7201-30000 sccm N2 Eq.) <700ms (30001-55000 sccm N2 Eq.)	Normally Closed Valve 300ms (<860 sccm N2 Eq.) 400ms (861-7200 sccm N2 Eq.) 500ms (7201-10000 sccm N2 Eq.)	Normally Closed Valve <1 sec
Response Time	Normally Open Valve <1.5 sec	Normally Open Valve —	Normally Open Valve —
Multi-Gas & Range Configurability	MultiFlo™ Standard	—	MultiFlo™ Standard
Pressure Transient Insensitivity	±5% S.P. up to 5 psi/sec upstream press. spike	± 5% S.P. for up to 5 psi/sec upstream press. spike	Ability to measure inlet pressure
Diagnostic Capability	Status Lights - MFC Health, Network Status Alarms - Control Valve Output, Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption
Analog Communication	0-5 Vdc	0-5 Vdc	0-5 Vdc
Digital Communication	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™	RS485 L Protocol DeviceNet™

Product Type

Mass Flow Controller

Differentiator

Ultra-High Purity

Ultra-Fast Response Time

Pressure Transient Insensitivity

Performance

Flow Range (Full Scale Capacity)

3 sccm - 300 slm

Accuracy

±1% S.P. > 35-100%

±0.35% F. S. 2-35%

Repeatability

< ±0.15% S.P.

Linearity

±0.5% F.S. (included in accuracy)

Response Time

300ms - < 1 sec

Response Time

Normally Open Valve: <1.5 sec

(specific models only)

Multi-Gas & Range Configurability

MultiFlo™ Standard (most models)

Pressure Transient Insensitivity

<5% S.P. for up to 5 psi/sec upstream press. spike

Control Range

< 5 - 100%

Number of Bins

Standard GF Series: 11 bins

High Flow GF Series: 4 bins

Valve Shut Down

< 2% F.S.

Zero Stability

< ±0.5% F.S. per year

Flow Temperature Coefficient

Span: 0.05% S.P. per °C

Zero: 0.005% F.S. per °C

Mechanical

Seal Material

Metal

Level of Purity / Surface Finish

4 - 5µ inch Ra

Wetted Materials

SEMI F20 HP Compliant

316L VIM/VAR

Hastelloy C-22

316L Stainless Steel

304 Stainless Steel

KM-45

Valve Options

Normally Closed

Normally Open (specific models)

Meter (no valve)

Ratings

Max Temperature

50oC

Differential Pressure Range

3-860 sccm = 7-45 psid

861 - 7200 sccm = 10 - 45 psid

7201 - 55000 sccm = 15 - 45 psid

51 - 300 slm = 30 - 90 psid

*Typical pressure drops. Contacts Brooks Technical Support for more information.

Max Pressure

Standard GF Series: 100 psia max

High Flow GF Series: 75 psig (controller), 150 psig (meter)

Leak Integrity

1x10-10 atm cc/sec He

Diagnostics & Display

Diagnostic Capability

Available

Status Lights

MFC Health

Network Status

Alarms

Control Valve Output

Network Interruption

Diagnostic / Service Port

RS485 via 2.5mm jack (all models)

Display

Top Mount Integrated LCD

Viewing Angle: Fixed

Viewing Distance: 10 feet

Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)

Resolution: 0.1 (unit)

Electrical

Analog Communication

0-5 Vdc

Digital Communication

DeviceNet™

RS485 L-Protocol

Electrical Connection

Analog/RS485 via 9-Pin "D" connector

DeviceNet™ via 5-Pin "M12" connector

Various cable adaptors available. See product data sheet for more information.

Power Supply / Consumption

Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)

DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc

(Under typical operating conditions)

Compliance

EMC

EC Directive 2004/108/EC

CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

Phản hồi

Người gửi / điện thoại

Mọi thông tin chi tiết vui lòng liên hệ theo thông tin bên dưới để được tư vấn rõ hơn:

Công ty TNHH Thương Mại và Dịch Vụ Tăng Minh Phát
Địa chỉ: 602/41E, Điện Biên Phủ, Phường 22, Quận Bình Thạnh, TP.HCM

Nguyễn Hoàng Tài (Mr.)

[Call] : 0915 031 817 - 01686 530 609

[Email] : sale10@tmpvietnam.com - hoangtai.tmpvietnam@gmail.com

GF125 Series Metal Sealed Thermal Mass Flow Controllers & Meters - Brooks Instrument Vietnam

Features

Benefits